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Vacuum Evaporation System Thin Film Coating Equipment With Ion Implantation System 

Place of Origin: Guangdong, China (Mainland) 
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Product Detail

Model No.: AIA-1

vacuum evaporation system for optics  with ion implantation system
 
 
General In

vacuum evaporation system for optics  with ion implantation system

 

 

General Information

 

 

Feature:

 

1. System Feature

 - Robust, Rugged Design: The system is designed for 24-hours a day production.

 - Customer Benefits:

  * Excellent layer properties

  * Increases productivity due to shorter batch times

  * Reliable hardware and safer process guarantee

  * Highest yield

  * Low production cost

  * Easy machine operation due to touch screen utilization

 - Global Service Support:

  * Local service centers

  * Preventive maintenance

  * Continuous process support

2. Specification

 - Overall Dimension: 3300(W) x 2100(D) x 2300(H) mm

 - Chamber Size: Ø1200 mm

 - Capacity, Ophthalmic Lens of Ø70 mm: 169 lenses / batch

 - Substrate Holder: 4-segment Al dome, with single rotation

 

Product characteristic:

  1. Accurate optic film deposition controller: crystal thickness monitor/optical monitor
  2. Center-driving or planetary substrate dome is selectable
  3. Uniformed and large area ion beam distribution Hall-ion source
  4. E-beam gun, stable power output, small and uniform E-beam spot
  5. Well uniformity of film thickness, well repeatability of deposition                                             

 

Vacuum Coating VS Traditional Electroplating

 

 

1.High coating quality, the most environmental and friendly

2.Big volume&High efficiency

3.Easy to operation

4.Long-term after service

 

 

Tag Keywords

 

optics machine , vacuum evaporation system , ophthalmic lens , coating machine , ophthalmic lens coating  machine , ion implantation system , 

 

 

VAKIA-REC Standard Specifications

 

model

OEC630

OEC900

OEC1100

OEC1200

OEC1350

OEC1600

application

Plating system for multilayer film, antireflection film, filters and beam splitting film, 7 colour film, cold light film, reflective film, etc.

Principal dimension

Inside the chamber

φ630×800

φ900×1100

φ1100×1300

φ1200×1450

φ1350×1500

φ1600×1500

Substrate umbrella stand

φ570

φ820

Φ1000

φ1100

φ1250

φ1500

Umbrella stand rotary speed

0~30r/min,continuously adjustable

Major parameter

Vacuumizing speed

From one bar to 5.0×10-3Pa12 minutes(no-load)

Ultimate vacuum

3.0×10-4Pa

Substrate temperature

350°C(maximum)

Exhaust system

Exhaust vacuum pumps

KT400 oil diffusion pump system

KT600 oil diffusion pump system

KT800 oil diffusion pump system

KT600 oil diffusion pump system

KT800 oil diffusion pump system

KT800 oil diffusion pump system

Cryogenic trap

Selective assembly

Heating system

Heating method

Up heating mode,heating plate adjust the heating power regional ,PID control

Heating power

6KW

6KW

12KW

12KW

24KW

48KW

Crystalline diaphragm thickness gauge

SQC-310(or XTC-3)

Vacuum gauge

thermocouple+thermionic cathode (Domestic)

flowmeter

Yamatake

Ion source

Domestic ion source

Electronic gun

Domestic electronic gun

Resistance type evaporation

Three electrode double group, electrode with water

 

 

Coating Samples

 

 

    

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 Mr. Lin

Tel: 86-21-57728812
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Company Info

SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD. [China (Mainland)]


Business Type:Manufacturer
City: Shanghai
Province/State: Shanghai
Country/Region: China (Mainland)

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