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Copper / Silver Optical Thin Film Coating System With E-beam Evaporation / Ion Source 

Place of Origin: Guangdong, China (Mainland) 
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Product Detail

Model No.: AIA-1

Copper and Silver Electron gun Vacuum Coating / E-beam Evaporation / Ion Source
 
 
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Copper and Silver Electron gun Vacuum Coating / E-beam Evaporation / Ion Source

 

 

General Information

 

Universal type optical coating machine feature:

 

  1. The crystalline diaphragm thickness monitoring,Coating process is full automatic control ;
  2. Can be mounted automatically over institutions, increase the capacity and reduce the production cost;
  3. Optical thin film process formula can provided according to the customer’s requirements, (inclusion technology);

 

Product characteristic:


1. Accurate optic film deposition controller: crystal thickness monitor/optical monitor
2. Center-driving or planetary substrate dome is selectable
3. Uniformed and large area ion beam distribution Hall-ion source
4. E-beam gun, stable power output, small and uniform E-beam spot
5. Well uniformity of film thickness, well repeatability of deposition

 

Optics Coatings: Anti-Reflection coating ( AF film), optical filter, color separation filter, telescope, periscope, microscope and digital camera.                                                 

 

 

Tag Keywords

 

electron gun , copper and silver , vacuum coating , E-beam , ion source , E-beam evaporation 

 

Parameters : 

 

 

model

OEC630

OEC900

OEC1100

OEC1200

OEC1350

OEC1600

application

Plating system for multilayer film, antireflection film, filters and beam splitting film, 7 colour film, cold light film, reflective film, etc.

Principal dimension

Inside the chamber

φ630×800

φ900×1100

φ1100×1300

φ1200×1450

φ1350×1500

φ1600×1500

Substrate umbrella stand

φ570

φ820

Φ1000

φ1100

φ1250

φ1500

Umbrella stand rotary speed

0~30r/min,continuously adjustable

Major parameter

Vacuumizing speed

From one bar to 5.0×10-3Pa12 minutes(no-load)

Ultimate vacuum

3.0×10-4Pa

Substrate temperature

350°C(maximum)

Exhaust system

Exhaust vacuum pumps

KT400 oil diffusion pump system

KT600 oil diffusion pump system

KT800 oil diffusion pump system

KT600 oil diffusion pump system

KT800 oil diffusion pump system

KT800 oil diffusion pump system

Cryogenic trap

Selective assembly

Heating system

Heating method

Up heating mode,heating plate adjust the heating power regional ,PID control

Heating power

6KW

6KW

12KW

12KW

24KW

48KW

Crystalline diaphragm thickness gauge

SQC-310(or XTC-3)

Vacuum gauge

thermocouple+thermionic cathode (Domestic)

flowmeter

Yamatake

Ion source

Domestic ion source

Electronic gun

Domestic electronic gun

Resistance type evaporation

Three electrode double group, electrode with water

 

 

 

Coating Samples

 

   

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 Mr. Lin

Tel: 86-21-57728812
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Company Info

SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD. [China (Mainland)]


Business Type:Manufacturer
City: Shanghai
Province/State: Shanghai
Country/Region: China (Mainland)

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