Copper / Silver Optical Thin Film Coating System With E-beam Evaporation / Ion Source AIA-1 manufacturer from China SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD.

Copper / Silver Optical Thin Film Coating System With E-beam Evaporation / Ion Source

Place of Origin:

Guangdong, China (Mainland)


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Product Detail

Model No.: AIA-1

Copper and Silver Electron gun Vacuum Coating / E-beam Evaporation / Ion Source

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Copper and Silver Electron gun Vacuum Coating / E-beam Evaporation / Ion Source

General Information

Universal type optical coating machine feature:

The crystalline diaphragm thickness monitoring,Coating process is full automatic control ;
Can be mounted automatically over institutions, increase the capacity and reduce the production cost;
Optical thin film process formula can provided according to the customer’s requirements, (inclusion technology);

Product characteristic:

1. Accurate optic film deposition controller: crystal thickness monitor/optical monitor
2. Center-driving or planetary substrate dome is selectable
3. Uniformed and large area ion beam distribution Hall-ion source
4. E-beam gun, stable power output, small and uniform E-beam spot
5. Well uniformity of film thickness, well repeatability of deposition

Optics Coatings: Anti-Reflection coating ( AF film), optical filter, color separation filter, telescope, periscope, microscope and digital camera.

Tag Keywords

electron gun , copper and silver , vacuum coating , E-beam , ion source , E-beam evaporation

Parameters :

model		OEC630	OEC900	OEC1100	OEC1200	OEC1350	OEC1600
application		Plating system for multilayer film, antireflection film, filters and beam splitting film, 7 colour film, cold light film, reflective film, etc.
Principal dimension	Inside the chamber	φ630×800	φ900×1100	φ1100×1300	φ1200×1450	φ1350×1500	φ1600×1500
	Substrate umbrella stand	φ570	φ820	Φ1000	φ1100	φ1250	φ1500
Umbrella stand rotary speed		0~30r/min,continuously adjustable
Major parameter	Vacuumizing speed	From one bar to 5.0×10-3Pa12 minutes(no-load)
	Ultimate vacuum	3.0×10-4Pa
	Substrate temperature	350°C(maximum)
Exhaust system	Exhaust vacuum pumps	KT400 oil diffusion pump system	KT600 oil diffusion pump system	KT800 oil diffusion pump system	KT600 oil diffusion pump system	KT800 oil diffusion pump system	KT800 oil diffusion pump system
	Cryogenic trap	Selective assembly
Heating system	Heating method	Up heating mode,heating plate adjust the heating power regional ,PID control
	Heating power	6KW	6KW	12KW	12KW	24KW	48KW
Crystalline diaphragm thickness gauge		SQC-310(or XTC-3)
Vacuum gauge		thermocouple+thermionic cathode (Domestic)
flowmeter		Yamatake
Ion source		Domestic ion source
Electronic gun		Domestic electronic gun
Resistance type evaporation		Three electrode double group, electrode with water