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SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD.  

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High Transmission Ag / SiO Layer ITO Film Coating Equipment PVD Sputtering Machine 

Place of Origin: Guangdong, China (Mainland) 
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Product Detail

Model No.: AIA-1

ITO Glass in Touch Panel, ITO Thin Film Coating Equipment, Ag, SiO Layer Coating, ITO High Transmission Coater
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ITO Glass in Touch Panel, ITO Thin Film Coating Equipment, Ag, SiO Layer Coating, ITO High Transmission Coater

 

Standard applications:  PET, high quality glass substrate. Like eletronic display, ITO coated microscope slide, Transparent shielding glass, conducting glass, defrosting film, De-icing film coating, 

 

Machine Built Time:  2012, China.

Application: AR film, ITO film, conductive coating etc. 

 

 

Technical Configurations: 

1) DC Sputtering Sources:  Cu, Al, ITO 

2) MF Sputtering Sources

3) Turbo Molecular pump + Backing Pump group 

4) High-intensity magnetic field to improve ITO film quality,   target utilization rate >30%

5) Cu, Al, Si targets utilization rate > 35%

6) Deposition Rate: 30nm m/min ~ 40nm m/min 

7) Sputtering Uniformity Area: 350mm 

 

 

VAKIA FOCUS ON DETAILS

 

 
 

 

VAKIA-MSC Standard Specifications

 

Model Size(mm)

Substrate  Jigs (Qty.)

Sputtering 

Power(kVA)

Sputtering 

Targets (Qty.)

Sputtering 

Cathode

MFC Remark
MSC800 Φ800xH800 1 2*50 DC 4 Cylinder 3 ITO coating
MSC1616 Φ1600xH1600 6,8 2*36 DC 2 Rectangular 2  2-door
 

 

 

Coating Samples

 

 

 

 

 

 

Please contact us for more information, Vakia Vacuum Coating is honored to be your your business partner. 

 

 

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 Mr. Lin

Tel: 86-21-57728812
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Company Info

SHANGHAI VAKIA COATING TECHNOLOGY CO.,LTD. [China (Mainland)]


Business Type:Manufacturer
City: Shanghai
Province/State: Shanghai
Country/Region: China (Mainland)

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